MEMS (Microelectromechanical Systems) refers to devices and system with extremely small size in the range of microns (1µm=10-6m). It is one of the most important high technologies developed in 20th century. MEMS and nanotechnology are believed to trigger the next wave of technology revolution. This course covers the fundamentals of MEMS technology. The topics include MEMS materials, MEMS fabrication techniques, MEMS structure analysis, MEMS sensing and actuation techniques, MEMS applications (inertial MEMS, MOEMS, BioMEMS, RFMEMS), signal sensing techniques for MEMS, MEMS packaging and reliability, etc.
1. Introduction to MEMS. 2. MEMS materials and their properties. 3. Fabrication of MEMS: micromachining. 4. MEMS Structure Analysis. 5. MEMS Sensing and Actuation Techniques. 6. MEMS for automotive/aerospace applications (Inertial MEMS). 7. MEMS CAD design and simulation (ANSYS/COMSOL). 8. MEMS for photonic applications (Micro-Opto-Electro-Mechanical Systems, MOMES). 9. MEMS for biological applications (BioMEMS). 10. MEMS for RF communication applications (RFMEMS). 11. MEMS packaging and reliability considerations. 12. MEMS fault testing
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I am a Mechanical Engineer with expertise in autocad and solidworks. I have also experience in industrial design and engineering materials. you may contact me via inbox?, I might provide some sketches (no cost)